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Microfabrication
               The chip design is shown in Figure 3. The fluidic layer of the dispensing device was produced

               via soft lithography from 3D-printed molds manufactured using stereolithography from Accura
               Xtreme (Shapeways, US). PDMS (Sylgard 184, DowSil) was mixed with the cross-linking

               agent at a ratio of 10:1, the mixture was spun down for 5 minutes and then degassed in a vacuum

               chamber for 15 minutes. Molds were filled with PDMS mixture and degassed to remove air
               prior to overnight curing at 70° C. The deflective membrane and the pneumatic layer were

               produced  via  xurography   16 .  Silicone  sheets  of  0.25  and  0.5  mm  (HT-6240,  Rogers
               Corporation) were cut using a knife plotter (GS‑24, Roland DGA). As interface layer, access

               holes of 1 mm in diameter were drilled into glass slides and cleaned in 70 % ethanol in an
               ultrasound bath for 15 minutes at RT before accommodating of the pneumatic tubing. The

               layers were bonded by placing two sequential layers into a plasma-bonding chamber (Basic

               Plasma Cleaner, PDC-32G-2, Harrick-Plasma, USA) for 2 minutes at the highest power setting.
               The two layers were carefully aligned on top of each other, pressed together for 5 minutes and

               then cured in the oven at 70° C for at least one hour, before adding the next layer. Once all the

               layers were assembled, the device was placed at 70° C overnight for a final bake to increase
               bonding strength between the two types of silicone used for production. Finally, 1 cm long

               pneumatic tubing was fixed on the interface using 2-component epoxy glue (LOCTITE EA
               9492) cured at 70° C for 4 hours to ensure air-pressure-driven actuation of the on-chip valves.




               Fabrication of microscaffolds
               The microscaffolds were fabricated using a high-resolution 3D printing method of two-photon

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               polymerization  (2PP),  as  previously  described  .  Zirconium  sol-gel  (ZrHyb)  was  used  as
                                   18
               described previously . In brief, 0.5 % w/w of 4,4′-Bis(diethylamino)benzophenone (160326,
               Sigma-Aldrich)  was  dissolved  as  a  photoinitiator  in  the  zirconium  sol-gel  containing  1-

               propanol as a solvent. The microscaffolds were produced using the following settings: laser
                                                                -1
               power of 140 mW, scanning speed of 1000 mm s , a hatch distance dX/dY of 0.5 µm and a
               layer spacing dZ of 2.5 µm. After structuring with 2PP, the sample holder was submerged in
               1-propanol for 1 h to dissolve any uncrosslinked material. Two additional washing steps were

               carried out before storing the microscaffolds in 1-propanol.






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